BMT-3056 Design of Microsensors, 5 cr


If you want to complete this course during academic year 2019-2020, please contact prof. Lauri Sydänheimo.
Suitable for postgraduate studies. Ei toteuteta lukuvuonna 2019-2020.


Lauri Sydänheimo


Toteutuskerta Periodi Vastuuhenkilö Suoritusvaatimukset
BMT-3056 2019-01 - Lauri Sydänheimo
Passed exercises, laboratory works and examination.


After having passed the study module the student will understand the designing and modelling principles of micro and MEMS sensors. He/she knows the manufacturing methods and processes of micro sensors in general terms and can use this information in the designing. He/she knows the most general modelling ways and can adapt them. He/she can use the different modelling and simulation programs. The student can list the examples of the different micro computer sensors, their designing principles and of application areas.


Sisältö Ydinsisältö Täydentävä tietämys Erityistietämys
1. Micro and MEMS structures, design and modeling principles, modeling and simulation methods of sensors   Comsol Multiphysics - modeling software    
2. Silicon and quartz as sensor materials, special cases of manufacturing and processing methods   Film depositing methods, dry etching   
3. Lumped element model, energy methods, two-port theory, dynamical models, elastic structures   Theory of electromagnetic fields   FEM modeling 
4. Electric, thermal and magnetic excitation, measurement methods, read-out eletronics, and noise.   Low-noise electronics, pahase-sensitive methods   
5. Examples of sensors, piezoresistive pressure sensor, capacitive acceleration sensor, piezoelectric gyroscope, resistive gas sensor     

Ohjeita opiskelijalle osaamisen tasojen saavuttamiseksi

The grade of the course is determined by examination. If the student knows the core material well, there is a possibility to pass the course with grade 3. The supplementing knowledge must be also known in order to reach a grade of 4 or 5. If in the core material there are minor shortcomings, the student will have an opportunity for the grade 1 or 2 depending on the amount of the shortcomings. Activity in exercises gives the opportunity for the additional points in the examination. If there are considerable shortcomings in the knowledge of the core material, the student will not pass the course.


Numerical evaluation scale (0-5)


Completion parts must belong to the same implementation


Tyyppi Nimi Tekijä ISBN URL Lisätiedot Tenttimateriaali
Book   Microsystem Design   Stephen D. Senturia   0-7923-7246-8       Yes   
Lecture slides   Design of Microsensors   Jukka Lekkala         Yes   


Opintojakso P/S Selite
BMT-3036 Microsensors Mandatory    


Opintojakso Vastaa opintojaksoa  Selite 
BMT-3056 Design of Microsensors, 5 cr ASE-3056 Design of Microsensors, 5 cr  

Päivittäjä: Väisänen Outi, 04.11.2019