BMT-3036 Microsensors, 5 cr


Sampo Tuukkanen


Toteutuskerta Periodi Vastuuhenkilö Suoritusvaatimukset
BMT-3036 2019-01 3 - 4 Sampo Tuukkanen
Antti Vehkaoja
Passed exercises, laboratory works, seminar presentation, report and examination.


After having passed the study module the student will understand the physical operating principles of micro sensors. He/she can classify the micro sensors and present them in a consistent way as energy converters. He knows several manufacturing methods and processes of micro sensors. The student is able to give examples of different micro sensor structures and is able to understand and analyse measurement connections and amplifiers that have been used with them. The student can model and simulate the function of simple micro sensors. He understands the limitations of the modelling. The student can list different micro sensors and of their application areas. The student understands the terms which are related to the encapsulation of micro sensors.


Sisältö Ydinsisältö Täydentävä tietämys Erityistietämys
1. Principles and classification of sensors, different signal energies, integrated sensors, design principles of microsensors.   Physical and chemical phenomena in solid materials, origin of noise and different noise types.   Modelling software (Comsol Multiphysics)  
2. Sensor materials, sensor fabrication technologies, thin and thick film manufacturing methods, silicon processing techniques, principles of photolithography, silicon micromechanics, encapsulation of microsensors.  Lattice structure and properties of silicon, principles of the processing instruments, components of microelectronics (diode, transistor, FET).    
3. Temperature sensors, Seebeck's phenomenon in metals and semiconductors, thermistors, diode and transistor as temperature sensor, radiation sensors, photoresistor, photodiode, pyroelectric sensors, pressure sensors.  Interaction of radiation with materia.    
4. Inertia sensors, acceleration sensors, gyro, flow sensors, magnetic sensors(Hall-sensor, magneto-resistive sensor), chemical sensors, ioniselective sensors, gas sensors.  Microfluidistics.    
5. Eapplications of microsensors, examples of commercial sensors.   Packaging methods of microelectronics.    

Ohjeita opiskelijalle osaamisen tasojen saavuttamiseksi

The grade of the course is determined by examination. If the student knows the core material well, there is a possibility to pass the course with grade 3. The supplementing knowledge must be also known in order to reach a grade of 4 or 5. If in the core material there are minor shortcomings, the student will have an opportunity for the grade 1 or 2 depending on the amount of the shortcomings. Activity in exercises gives the opportunity for the additional points in the examination. If there are considerable shortcomings in the knowledge of the core material, the student will not pass the course.


Numerical evaluation scale (0-5)


Completion parts must belong to the same implementation


Tyyppi Nimi Tekijä ISBN URL Lisätiedot Tenttimateriaali
Book   Microsensors - Principles and Applications   Julian W. Gardner   0 471 94135 2       No   
Lecture slides   Microsensors   Jukka Lekkala         Yes   


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BMT-3036 Microsensors, 5 cr ASE-3036 Microsensors, 5 cr  

Päivittäjä: Kunnari Jaana, 05.03.2019