Course Catalog 2011-2012
ASE-3056 Design of Microsensors, 5 cr
Suitable for postgraduate studies
Will not be lectured year 2011-2012
Passed exercises, laboratory works and examination.
Completion parts must belong to the same implementation
After having passed the study module the student will understand the designing and modelling principles of micro and MEMS sensors. He/she knows the manufacturing methods and processes of micro sensors in general terms and can use this information in the designing. He/she knows the most general modelling ways and can adapt them. He/she can use the different modelling and simulation programs. The student can list the examples of the different micro computer sensors, their designing principles and of application areas.
|Content||Core content||Complementary knowledge||Specialist knowledge|
|1.||Micro and MEMS structures, design and modeling principles, modeling and simulation methods of sensors||Comsol Multiphysics - modeling software|
|2.||Silicon and quartz as sensor materials, special cases of manufacturing and processing methods||Film depositing methods, dry etching|
|3.||Lumped element model, energy methods, two-port theory, dynamical models, elastic structures||Theory of electromagnetic fields||FEM modeling|
|4.||Electric, thermal and magnetic excitation, measurement methods, read-out eletronics, and noise.||Low-noise electronics, pahase-sensitive methods|
|5.||Examples of sensors, piezoresistive pressure sensor, capacitive acceleration sensor, piezoelectric gyroscope, resistive gas sensor|
Evaluation criteria for the course
The grade of the course is determined by examination. If the student knows the core material well, there is a possibility to pass the course with grade 3. The supplementing knowledge must be also known in order to reach a grade of 4 or 5. If in the core material there are minor shortcomings, the student will have an opportunity for the grade 1 or 2 depending on the amount of the shortcomings. Activity in exercises gives the opportunity for the additional points in the examination. If there are considerable shortcomings in the knowledge of the core material, the student will not pass the course.
Numerical evaluation scale (1-5) will be used on the course
|Type||Name||Author||ISBN||URL||Edition, availability, ...||Examination material||Language|
|Book||Microsystem Design||Stephen D. Senturia||0-7923-7246-8||English|
|Lecture slides||Design of Microsensors||Jukka Lekkala||English|
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